對于許多工業和半導體加工過程，性能和成本效率同樣重要。GF80 系列金屬密封質量流量控制器擁有以下兩個特點：設計采用與的 GF100 系列響應速度相同的傳感器以及第四代 MultiFlo™ 技術，該產品是高性價比運營的正確選擇。另外，金屬密封的 MFC 擁有 MultiFloTM 多氣體/多量程功能所帶來的全部優勢，原因是可用氣體方面沒有限制并且由于不會發生彈性體氧滲透而提升了氣體純度，同時還由于金屬密封件有效期相當長而減少了維護工作量。
特點
- 長期零點穩定性，每年變動小于滿量程的 ± 0.5%
- 1 秒內穩定
- 滿量程流速高達 300 slpm
- 全金屬密封流路 - 16µ 英寸 Ra 表面處理
- 耐腐蝕 Hastelloy® 傳感器可在較低溫度下工作，適用于易發生熱分解的氣體
- 可編程 MultiFloTM 功能 - 一臺設備即可滿足數千種氣體類型和各種量程組合的需求，無需從氣路上拆除 MFC 并且不影響精度
- 通過有源溫度補償實現的溫度系數規范
- 內嵌式常規自檢功能和獨立的診斷/維護端口
- 帶有 VCR 配件的細線體設計
- DeviceNetTM、Profibus®、RS-485 和模擬接口
優勢
- 1 秒完成流量穩定，消除廢氣和過程變量影響
- 未采用會發生氧滲透并且使用一定時間之后需要進行更換的彈性體密封件
- MultiFloTM 精簡了過程氣體切換操作 — 無需再拆除并重新校準 MFC
- 60 秒內即可完成新氣體和/或量程的設定操作
- 測量精度不受溫度變化影響
- 可輕松訪問診斷端口以實現運行時間
- 規格緊湊，可輕松集成至緊張的設備空間內；設備改型的選擇
- 多協議通信接口可簡化向現有系統的集成操作
應用
- 對翻新后的半導體加工工具中的原有 MFC 進行經濟高效的改型/升級
- 減少六英寸/八英寸半導體工廠的 MFC 庫存
- 用于 LED 和功率器件生產的 MOCVD
- 太陽能/薄膜化學氣相沉積 (CVD) 系統
- 分析用 OEM 設備
概述
| GF80 | |
| 區別 | High Purity Low Flow Rate |
| 流量范圍-滿量程容量 | 3 sccm - 55 slm |
| 表面拋光 | 16µ inch Ra |
| 精度 | ±1% S.P. 35-99% ±0.35% F.S. 2-35% |
| 重復性 | < ±="" 0.2%=""> |
| 響應時間-常閉 | Normally Closed Valve <1> |
| 多氣體多量程 | MultiFlo™ Available |
| 瞬時壓力波動不敏感 | — |
| 診斷能力 | Status Lights: MFC Health, Network Status Alarms: Control Valve Output, Network Interruption |
| 模擬通訊 | 0-20 mA 4-20 mA 0-5 Vdc 0-10 Vdc |
| 數字通訊 | Profibus RS485 S-Protocol RS485 L-Protocol DeviceNet™
|
型號
Mass Flow Controller
±1% S.P. 35-99%
±0.35% F.S. <>
±0.5% F.S. (included in accuracy)
Normally Closed Valve: <1>
< 5%="" -="">
Standard GF Series: 11 bins
High Flow GF Series: 4 bins
Standard GF Series: < 1%="">
High Flow GF Series: < 4%="" of="" standard="" configuration="" f.s.="" @="" 30psig/atm="" out="" n2="">
316 Stainless Steel
Hastelloy C-22
17-7 PH
430SS
KM-45
Normally Closed
Meter (no valve)
3-860 sccm = 7-45 psid
861-7200 sccm = 15-45 psid
7201-50000 sccm = 25-45 psid
51-300 slm = 30-90 psid
(typical pressure drops)
Standard GF Series: 150 psig (10 bar)
High Flow GF Series: Meter = 75 psig (5 bar), Controller = 150 psig (10 bar)
Control Valve Output, Network Interruption
RS485 via 2.5mm jack (all models)
0-20 mA
4-20 mA
0-5 Vdc
0-10 Vdc
DeviceNet™
Profibus®
RS485 S-Protocol
RS485 L-Protocol
RS485 A-Protocol (GF081)
Profibus/Analog via 9-Pin "D" connector
RS485/Analog via 9-Pin"D" connector, 15-Pin "D" connector
DeviceNet™ via 5-Pin "M12" connector
Standard GF Series: RS485 from +12 Vdc to +24 Vdc = 7 Watts max
Profibus from +13.5 Vdc to +27 Vdc = 7 Watts max
DeviceNet™ from +11 Vdc to +25 Vdc = 13.6 Watts max
High Flow GF Series: RS485 from +12 Vdc to +24 Vdc = 3.3 Watts max
Profibus from +13.5 Vdc to +27 Vdc = 3.3 Watts max
DeviceNet™ from +11 Vdc to +25 Vdc = 3.3 Watts max
CE: EN6126: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Safety EN61010-1
RoHS
文檔
| Filename | File Type | Documents By Language |
|---|---|---|
| Data Sheet | English Japanese | |
| Installation & Operation Manual | English Japanese | |
| DeviceNet™ Supplemental Manual - GF40, GF80 | English | |
| EtherCAT® Supplemental Manual - GF40, GF80 | English | |
| RS485 A-Protocol Supplemental Manual - GF40, GF80 | English | |
| RS485 L-Protocol Supplemental Manual - GF40, GF80 | English | |
| RS485 S-Protocol Supplemental Manual - GF40, GF80 | English | |
| CE EU Declaration of Conformity Certificate | English |
CAD Drawings
Use the model code information from the data sheet to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.
| Filename | File Type |
|---|---|
| GF080-VX-DNET-STEP | STEP |
| GF080-VX-L4-STEP | STEP |
| GF080-VX-S0 | DXF |
| GF080-VX-S0 | IGS |
| GF080-VX-S0 | STEP |
| GF080-VX-S4 | DXF |
| GF080-VX-S4 | IGS |
| GF080-VX-S4-STEP | STEP |
| GF080-VX-S5 | DXF |
| GF080-VX-S5 | IGS |
| GF080-VX-S5 | STEP |
附件和軟件
