GF125 系列產品是第二代多變量壓力變化補償型 (PTI) 金屬密封質量流量控制器和儀表，有著超快的響應速度和超高的純度。作為個將 PTI 質量流量控制技術引入市場的 GF125 系列產品限度降低了壓力和溫度波動導致的過程氣體流量變化。一臺采用標準 MultiFlo™ 技術的 MFC 即可滿足數千種氣體類型和各種量程組合的需求，無需從氣路上拆除 MFC 并且不影響精度。
結果：降低了氣體顯示屏尺寸和成本，這得益于省去了壓力調節器、壓力傳感器和相關硬件的使用并輔以行業的 PTI 性能以限度提高產率和生產效率。
概述
特點
- 長期零點穩定性，每年變動小于滿量程的 ± 0.5%ar
- 穩定時間極短：300 ms - <700>
- 滿量程流速高達 300 slpm
- 超高純度流路 - 4µ 英寸 Ra 表面處理
- 符合 SEMI F20 標準的接液材料
- 采用高速 ARM 處理器的耐腐蝕 Hastelloy® T-Rise 傳感器
- 可進行快速反應的無隔膜閥組件不受壓差影響，并且測試表明產品經七百萬次循環
- MultiFlo™ 技術擁有的靈活性 — 一臺設備經編程設定后即可滿足數千種不同氣體和流量測量范圍配置的需求，無需從氣路上拆除 MFC 并且不影響精度
- 本地顯示屏可指示流量、溫度、壓力和網絡地址以便于輕松解決供氣和隔離閥故障問題
- DeviceNet™、RS-485 L-協議和模擬接口
優勢
- GF125 系列產品通過將布魯克斯儀器的流量傳感器技術與能夠進行快速反應的無隔膜閥組件相結合，可將響應速度和穩定速度較之其他質量流量控制器提高 3 倍。
- 經優化的接液流路，可提升干燥效果
- MultiFloTM 技術可實現 MFC 流量測定量程的重新設定，通常是按 3:1 下調并且不影響精度，量程比或內漏率，以提供的工藝和庫存靈活性
- 全面的氣體數據庫為您提供泛的氣體保護信息
- 壓力變化補償 (PTI) 功能能夠克服傳統 MFC 的限制（受進氣壓力波動影響明顯）。產品效果表明其性能穩定并且可達到預期精度。
- 便捷的用戶顯示屏和獨立的診斷/維護端口有助于設備安裝、監測和故障排除
關鍵應用
- 半導體
- MOCVD（金屬有機化學氣相沉積）
- 要求使用高純度全金屬流路的氣體流量控制應用
便捷的維護端口
- 輕松進行診斷和故障排除
- 不影響工具通信
用戶界面
- 輕松安裝、啟動和操作
機械耦合閥
- 耐腐蝕全金屬閥
- 采用無隔膜設計并且不受壓差影響
- 高速吹掃功能
- 測試表明產品經四百萬次循環
壓力傳感器
- 不受輸送壓力擾動或波動影響的穩定流量控制
第二代溫升傳感器
- 出色的長期穩定性（<+0.5%>
- 提高了信噪比
- 高速吹掃功能
- 可在較低溫度下工作，適用于易發生熱分解的氣體
溫度傳感器
- 可在全溫度范圍內進行準確的流量和溫度測量
- 實時補償環境溫度波動，實現準確的氣體化學控制
型號
| GF125 | GF126 | |
| 區別 | Ultra-High Purity Ultra-Fast Response Time Pressure Transient Insensitivity | High Flow Rate |
| 流量范圍-滿量程容量 | 3 sccm - 55 slm | 55 slm - 300 slm |
| 表面拋光 | 4µ inch Ra | 4µ inch Ra |
| 精度 | ±1% S.P. > 35-99% ±0.35% F.S. 2-35% | ±1% S.P. > 35-99% ±0.35% F.S. 2-35% |
| 重復性 | < ±0.15%=""> | < ±0.15%=""> |
| 響應時間-常閉 | Normally Closed Valve 300ms (3-860 sccm N2 Eq.) 400ms (861-7200 sccm N2 Eq.) 500ms (7201-30000 sccm N2 Eq.) <700ms (30001-55000="" sccm="" n2="">
| Normally Closed Valve <1>
|
| 響應時間-常開 | Normally Open Valve <1.5> | Normally Open Valve — |
| 多氣體多量程 | MultiFlo™ Standard | MultiFlo™ Standard |
| 瞬時壓力波動不敏感 | ±5% S.P. up to 5 psi/sec upstream press. spike | Ability to measure inlet pressure |
| 診斷能力 | Status Lights - MFC Health, Network Status Alarms - Control Valve Output, Network Interruption | Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption |
| 模擬通訊 | 0-5 Vdc | 0-5 Vdc |
| 數字通訊 | RS485 L Protocol DeviceNet™ | RS485 L Protocol DeviceNet™
|
規格
Mass Flow Controller
Ultra-High Purity
Ultra-Fast Response Time
Pressure Transient Insensitivity
3 sccm - 300 slm
±1% S.P. > 35-99%
±0.35% F. S. 2-35%
±0.5% F.S. (included in accuracy)
300ms - < 1="">
Normally Open Valve: <1.5>
(specific models only)
<5% s.p.="" for up="" to="" 5="" psi/sec="" upstream="" press.="">
< 5="" -="">
Standard GF Series: 11 bins
High Flow GF Series: 4 bins
< 2%="">
Span: 0.05% S.P. per °C
Zero: 0.005% F.S. per °C
Metal
SEMI F20 HP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel
KM-45
Normally Closed
Normally Open (specific models)
Meter (no valve)
3-860 sccm = 7-45 psid
861 - 7200 sccm = 10 - 45 psid
7201 - 55000 sccm = 15 - 45 psid
51 - 300 slm = 30 - 90 psid
*Typical pressure drops. Contacts Brooks Technical Support for more information.
Standard GF Series: 100 psia max
High Flow GF Series: 75 psig (controller), 150 psig (meter)
MFC Health
Network Status
Control Valve Output
Network Interruption
RS485 via 2.5mm jack (all models)
Top Mount Integrated LCD
Viewing Angle: Fixed
Viewing Distance: 10 feet
Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)
Resolution: 0.1 (unit)
0-5 Vdc
DeviceNet™
RS485 L-Protocol
Analog/RS485 via 9-Pin "D" connector
DeviceNet™ via 5-Pin "M12" connector
Various cable adaptors available. See product data sheet for more information.
Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)
DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc
(Under typical operating conditions)
EC Directive 2004/108/EC
CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
文檔
| Filename | File Type | Documents By Language |
|---|---|---|
| Data Sheet - GF125 | English Japanese | |
| Data Sheet - GF126 | English | |
| Installation & Operation Manual | English | |
| DeviceNet™ Supplemental Manual - GF100 Series | English | |
| RS485 L-Protocol Supplemental Manual - GF100 Series | English |
CAD Drawings
Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.
Example: GF125 - WX (Fitting) - GX (Connector) - STEP
| Model Series | Fitting | Connector | File Type |
| GF1xx | AS - 1-1/2” body width, 92 mm 0.440” large bore C Seal (only for bins SH45-SH50) | BX - Cable adapter to 15 pin D Brooks (Unit “B”,”N”) adapts G1 base | STEP |
| CX - 1-1/8” body width, 92 mm C Seal | *DX - DeviceNet™ 5 pin micro | ||
| VX - 1-1/2” body width, 124mm 1/4” VCR male | EX - Cable adapter to Card Edge (w/o VTP), RS485 through RJ11 jacks (Unit”E”; IN “L”, “R”) adapts GX base | ||
| WX - 1-1/8” body width, 92mm W Seal | GX - 9-Pin D with RS485 (Unit”G”); display and overlay 180 degree orientation | ||
| G1 - 9-Pin D with RS485 (Unit”G”) | |||
| SX - 9 pin D with STEC pin-out (w/VTP) (Unit”S”,”Q”) |
| Filename | File Type |
|---|---|
| GF100-GF120-GF125-AS-G1 | STEP |
| GF100-GF120-GF125-AS-SX | DXF |
| GF100-GF120-GF125-AS-SX | IGS |
| GF100-GF120-GF125-AS-SX | STEP |
| GF100-GF120-GF125-AX-G1 | STEP |
| GF100-GF120-GF125-AX-G1 | IGS |
| GF100-GF120-GF125-CX-DX | STEP |
| GF100-GF120-GF125-CX-SX | DXF |
| GF100-GF120-GF125-CX-SX | STEP |
| GF100-GF120-GF125-CX-TX | STEP |
| GF100-GF120-GF125-CX-TX | IGS |
| GF100-GF120-GF125-CX-TX | DXF |
| GF100-GF120-GF125-DX-DX | DXF |
| GF100-GF120-GF125-DX-DX | IGS |
| GF100-GF120-GF125-DX-DX | STEP |
| GF100-GF120-GF125-DX-TX | DXF |
| GF100-GF120-GF125-DX-TX | IGS |
| GF100-GF120-GF125-DX-TX | STEP |
| GF100-GF120-GF125-VS-SX | STEP |
| GF100-GF120-GF125-VS-SX | IGS |
| GF100-GF120-GF125-VS-SX | DXF |
| GF100-GF120-GF125-VX-BX | STEP |
| GF100-GF120-GF125-VX-DX | STEP |
| GF100-GF120-GF125-VX-E0 | DXF |
| GF100-GF120-GF125-VX-E0 | IGS |
| GF100-GF120-GF125-VX-E0 | STEP |
| GF100-GF120-GF125-VX-EX | STEP |
| GF100-GF120-GF125-VX-G1-STEP | STEP |
| GF100-GF120-GF125-VX-GX-STEP | STEP |
| GF100-GF120-GF125-VX-SX-STEP | STEP |
| GF100-GF120-GF125-WX-GX-STEP | STEP |
| GF101-GF121-GF126-V1-D0 | DXF |
| GF101-GF121-GF126-V1-D0 | IGS |
| GF101-GF121-GF126-V1-D0 | STEP |
| GF101-GF121-GF126-V1-DX | DXF |
| GF101-GF121-GF126-V1-DX | IGS |
| GF101-GF121-GF126-V1-DX | STEP |
| GF101-GF121-GF126-V1-E0 | DXF |
| GF101-GF121-GF126-V1-E0 | IGS |
| GF101-GF121-GF126-V1-E0 | STEP |
| GF101-GF121-GF126-V1-G1 | DXF |
| GF101-GF121-GF126-V1-G1 | IGS |
| GF101-GF121-GF126-V1-G1 | STEP |
| GF101-GF121-GF126-V2-G1 | DXF |
| GF101-GF121-GF126-V2-G1 | IGS |
| GF101-GF121-GF126-V2-G1 | STEP |
| GF101-GF121-GF126-V2-SX | DXF |
| GF101-GF121-GF126-V2-SX | IGS |
| GF101-GF121-GF126-V2-SX | STEP |
