HORIBA STEC LF-F404M-A-EVD OMCTS 5g/min液質流量計

深圳市天鉉真空技術有限公司HORIBA STEC流量計LF-410A-EVD TEOS 4g/min液質壓力計

sell  Exchang  Repair

Debbbbbbion注入機 FILAMENT P.S電源MKS薄膜真空壓力計750C11MGA4GF

Aviza/SPTS Omega ICP etcher configuration inbbbbation:

1.Configured for 8'' wafer

2.automatic wafer handling

3.Cl2 based etching process

4.3 process modules

5.Inspected by SPTS OEM engineer

6.Missing 1x Mag7 robot

7.Missing 1x VCE B controller

8.Missing 1x 24V DC Power supply

ETCH主要產品涉及金屬加工件chamber Linear/heater/slit door）；密封件；以及ESC（包括ESC 翻 新

延長了使用壽命