主要特征l 采用L型移動橋式,由兩到三個高精度等高塊穩固支撐Y向槽型導軌,左立柱與橫梁、滑架、鞍座共同組成移動橋,運動部件采用高硬度輕質鋁合金材料l X軸和Z軸均采用超精加工及經過硬質陽極化處理的擠壓輕質鋁合金l Y軸采用一體化槽型花崗巖導軌l Z軸采用可調式氣動平衡設計,提高了機器的動態性能,提升Z軸安全性l 各運動軸均采用高性能直流伺服測速機組和單級多楔帶減速系統l 三軸采用預載荷空氣軸承,運動更平衡,導軌*受磨損l 采用HEXAGON高分辨率金質光柵,分辨率高達0.039vml 測量機三軸及工件都配置溫度傳感器,實時監控溫度變化機器型號
Function plus10158 Function plus 10218 Function plus 10308 Function plus 122110 Function plus123010 Function plus 152110 Function plus 153010 Function plus 152112 Function plus153012行程(mm)X100010001000120012001500150015001500Y150021003000210030002100300021003000Z800800800100010001000100012001200測量空間(mm)Dx136413641364156415641864186418641864Dz151151151151151151151151151Dz1951951951115111511151115113511351平臺(mm)Ph400400400400400400400400400Py200026003500260035002600350026003500支撐(mm)Sy1400400400400400400400400400Sy2120018002700180027001800270018002700Sx130013001300150015001800180018001800外形尺寸(mm)L272633264226332642263326422633264226W178017801780198019802280228022802280H342234223422362236223622362238223822承重(kg)130018002000300035003000350030003500機器重量(kg)550065009500760011000860013000880013200MPEe(μm)3.1+L/3003.5+L/3004.0+L/3005.0+L/300MPEp(μm)3.33.74.25.2光柵尺分辨率(μm)0.078空間移動速度(mm/s)433空間移動加速度(mm/s2)1039流量/供氣壓力2.5dm3/s(150 NImin). >0.7Mpa注:工作環境為溫度(20±2)℃, 濕度為45%-75%