英國Renishaw XL-80激光測量系統
新型Renishaw XL-80激光測量系統為坐標測量機和機床等運動系統提供高性能精度校準。
XL-80系統快速、精確、非常輕便，保留了Renishaw ML10在日常使用中所表現出的高精度、可靠性和耐用性等重要優點。XL-80與*的軟件解決方案和優異的性能相結合，可以提高貴公司的經營業績。
XL-80激光干涉儀的主要優點
Renishaw設計、制造和供應激光系統已有二十多年的歷史。XL－80是這些設計和制造豐富經驗的結晶，具有真正的系統性能和操作優點。
| 便攜性和易用性 XL-80激光和XC－80補償器體積小巧，一套完整的線性測量系統裝在一個“便攜箱”中，重量僅12公斤。再加一個三腳架（裝入尼龍拉鏈攜帶箱中），您就有了一個真正便攜的機器測量方案。激光和補償器均可通過USB與PC機連接，因此無需單獨的接口，也無需擔心復雜的設定。 |
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| 精度和動態性能 精確穩定的激光源和準確的環境補償，保證了±0.5 ppm的線性測量精度。讀數以50 kHZ頻率讀取，線性測量速度可達4 m/s，即使在速度下線性分辨率仍可達1 nm。所有測量選項（不僅是線性）都采用干涉儀測量，使您對記錄數據的精度有信心。 |
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| 使用方便 XL-80設定和使用快速簡便，減少了等待時間，增加了用于測量的時間，同時保留了純粹干涉測量系統精度高的優點。
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| 全面信心 優質揑設計、惂憿榓媄術巟帩惀Renishaw揑標巙惈摿惇。不管測量的是微米還是納米，的設施和質量保證都極為重要。標準的三年保修期和支持網絡體現了我們對您的承諾。 |  |
激光校驗機器的優點
提高機器的正常運行時間
不管使用哪種機器或運動系統，在開始切削或加工材料或測量部件之前，您都需要知道設備運行是否正常。 您可以了解機器定位性能的每個特性隨時間發生變化的詳細情形，預測某特定機器何時需要維修并預先建立應急計劃。
提告機器性能
通過有針對性的維護和誤差補償，Renishaw的性能測量設備可確實提升機器的性能。
增強對機器或加工能力的了解
使用適合工作要求的機器 — 把工作安排給能夠達到公差要求的機器，確保機器適合工作要求并且廢品率較低。
證明機器性能
當客戶需要對您的機器質量或工藝樹立信心時，校準曲線和定期性能評估結果將是證明。它們能夠賦予您寶貴的競爭優勢，使您于那些沒有進行這些測試的制造商。
符合質量保證規程和標準
ISO 9000系列質量標準要求采用的、可溯源的系統和方法對生產和檢測設備進行校準、監視和控制。
提供專業的維護服務
高質量的售后服務。在用戶現場使用與系統原始制造商在其工廠內使用的相同校準工具進行校準，這是使機器恢復為制造商原始規格的方法。
XL系統組件
The basis of the new system is a compact laser head (XL-80) and an independent environmental compensator system (XC-80). A tripod and stage may also be required depending upon the application.
Together with measurement optics and software they form a highly accurate measurement and analysis system that can be stored and transported in one of the optional custom designed storage/transport cases.
XL-80 laser unit
The XL-80 laser produces an extremely stable laser beam, with a wavelength that is traceable back to national and international standards.
- Laser frequency stability ±0.05 ppm over 1 year and ±0.02 ppm over 1 hour is achieved by dynamic thermal control of the laser tube length to within a few nanometres.
- Linear measurement accuracy ±0.5 ppm over the whole environmental range ie, from 0 ºC - 40 ºC (32 ºF - 104 ºF) and 650 mbar - 1150 mbar. Readings can be taken at up to 50 kHz, with a maximum linear measurement speed of 4 m/s and a linear resolution of 1 nm; even at maximum speed.
- Integrated USB means there is no requirement for a separate laser-to-PC interface.
- LED status lights indicate the laser status and signal strength, providing a convenient alternative to the software’s “on-screen” indicators.
- Switchable between standard (40 m) and long (80 m) range modes.
- Analogue I/O port allows for analogue signal output ａnd a trigger signal input.
- Warm-up time is less than 6 minutes.
- External, switch mode power supply ensures 90 V - 264 V flexibility in input voltage.
All of the above features make the XL-80 quick and easy to use.
In accordance with (IEC) EN60825-1, Renishaw XL-80 lasers are Class 2 lasers and safety goggles are not required. Always refer to the system manual for safety details before operating the system for the first time.
XC-80 compensator and sensors
The XC-80 compensator is a crucial factor in your XL system’s linear measurement accuracy. Featuring “intelligent sensors” that process the readings at source, the compensator very accurately measures air temperature, air pressure and relative humidity. Changes in these conditions can effect the wavelength of the laser light and the measurement readings taken.
The XC-80 uses the sensor readings to modify the nominal value of the laser wavelength to give a true value, which is then used in calculations to virtually eliminate any measurement errors resulting from these variations.
If you are interested in accuracy you NEED effective wavelength compensation.
Key features of XC-80 include:
- Uniform compensation - The design of the XC-80 and sensors ensures uniform and extremely accurate readings over the full range of environmental operating conditions.
- Frequent sensor updates - This can be done automatically every seven seconds, as indicated by LED status lights on the XC-80 unit.
- Integrated USB - The inetgral USB connection means there is no separate PC interface ａnd no separate power supply (the USB supplies the XC-80 and sensors' power).
- Lightweight - The XC-80 weighs 550 g, and together with the XL-80, weighs just over 3 kg (including connecting cables, XL power supply and sensors).
- Intelligent air and material temperature sensors - The integral microprocessors analyse and process the sensor's output before sending digital temperature values to the XC-80 compensator. This offers more secure measurements and is a key reason why the XC-80 is so compact and also ensures sensors are fully interchangeable without comprimising accuracy.
- Up to three material temperature sensors can also be attached to the XC-80 compensator to allow linear measurements to be normalised to a standard material temperature of 20 °C.
- Versatile sensor cables - The standard 5 m long sensor cables are detachable for easy replacement and can be screwed together for extended lengths on longer machines.
Note: Environmental compensation is NOT required for angular or straightness measurements when using a Renishaw system as these are calculated from differences in two beam paths close together, where the environmental factors self cancel. As rotary axis, flatness and squareness measurements are also based on these measurements they also do not require environmental compensation.
Tripod and stage
Unless you are using a dedicated measurement rig, then you are likely to need a mounting stage (ａnd in most cases a tripod) to adjust the laser’s position relative to the desired measurement axis.
The XL mounting stage allows for precise angular rotation and translation of the XL-80. It is designed to be left attached to the laser unit for easy storage and quick set-up. - A "quick fit/release" mechanism enables rapid and secure fixing to a tripod. For those applications where tripod mounting is not convenient, e.g. for mounting directly on a machine tool table, the stage and laser can also be mounted on to most standard magnetic bases, using an optional adapter with M8 thread.
- The new Universal tripod has been extensively tested to provide a stable, adjustable base in a compact, lightweight unit.
性能和測試
All of Renishaw's experience in metrology and laser interferometry is to be found in each and every measurement system that it produces. Our aim is to deliver the specified accuracy, with full traceability and confidence that the laser system will continuously deliver that accuracy day-after-day where it counts, in the workplace.
All lasers and ballbars are calibrated at the Renishaw factory against reference systems with traceability to national standards.
System performance
Performance specifications are verified to international procedures against a documented system error budget, with system accuracy quoted to 95% confidence level (k = 2), which is valid across the full environmental operating range.
Without reliable and accurate wavelength compensation, errors of 20 ppm - 30 ppm would be common. Great effort has been taken to ensure Renishaw’s XC-80 compensation system and sensors are accurate across the entire operating range of the system. It is this that maintains ±0.5 ppm linear measurement accuracy from 0 ºC - 40 ºC (32 ºF - 104 ºF) and over the full air pressure range.
| Linear measurement range | 80 metres |
| Linear measurement accuracy | ±0.5 ppm |
| Linear frequency accuracy (1 year) | ±0.05 ppm |
| Resolution | 1 nm |
| Maximum travel velocity | 4 m/s |
| Dynamic capture rate | 10 Hz - 50 kHz * |
| Preheat time | < 6 minutes |
| Specified accuracy temperature range | 0 °C - 40 °C |
| Storage temperature range | -25 °C to +70 °C |
Environmental sensor performance
| Sensor | Range | Accuracy |
|---|---|---|
| Material temperature | 0 °C - 55 °C | ±0.1 °C |
| Air temperature | 0 °C - 40 °C | ±0.2 °C |
| Air pressure | 650 mbar - 1150 mbar | ±1 mbar |
| Relative humidity (%) | 0 - 95% non condensing | ±6% RH |
* Choose one of 12 pre-defined capture rates.
XL-80所用的測量光學鏡組
Renishaw measurement optics enable you to measure linear, pitch, yaw, horizontal and vertical straightness along any axis. Additional optic kits are available to enable measurement of surface flatness and squareness of axis.
The same optics can be used with XL-80 or ML10 systems, ensuring consistency of measurement set-ups and procedures. All measurements are interferometric and therefore use the traceable international standard wavelength of laser light, allowing you to have total confidence in the results.
For rotary axis calibration, please see RX10 rotary axis calibration section and for other optical accessories to assist in set-up and measurement, please see the optics accessories section.
Features and benefits
Interchangeable - The unique design of linear, angular and straightness optics enables easy interchange for different measurements, without having to re-align the laser.
Convenient - Moving optics have no cables to drag or snag, for best accuracy and convenience.
Low mass aluminium optics - The optics are manufactured in aluminium, therefore the optics' low mass is especially relevant if measuring pitch errors on horizontal arm CMMs and for dynamic measurements.
Quick acclimatisation - Some competitor systems use stainless steel optic housings. These are much heavier than Renishaw's aluminium optics and have a lower thermal conductivity, therefore taking longer to acclimatise to the shop environment.
Linear measurement optics kit
Linear measurement is by far the most common form of measurement performed on a machine.
Each linear measurement optics kit contains:
- 1 linear interferometer
- 2 linear retroreflectors and clamp screws
- 2 alignment targets
| Part number | Description |
|---|---|
| A-8003-0440 | Linear measurement optics kit |
Specification
| Standard range | 0 m - 40 m (0 in - 1600 in) |
| System accuracy (when used with XL-80 system) | ±0.5 ppm (parts per million) |
| (when used with ML10 Gold Standard) | ±0.7 ppm |
| (when used with ML10, pre-Gold Standard) | ±1.1 ppm |
| Resolution | 0.001 µm (0.1 µin) |
| Maximum velocity | 4 m/s (9600 in/min) |
| Velocity measurement accuracy | ±0.05% |
For linear measurements over 40 m you will require the long range linear accessory kit
Angular measurement optics kit
These optics allow angular pitch and yaw measurements to be made. Can measure maximum angular deflections of up to ±10° with resolution of 0.01 arc sec.
Each angular measurement kit contains:
- 1 angular retroreflector
- 1 angular interferometer
- 2 alignment targets
| Part number | Description |
|---|---|
| A-8003-0441 | Angular measurement optics |
Specification
| Axial range | 0 m - 15 m (0 in - 590 in) |
| Angular measurement range | ±175 mm/m (±10°) |
| Angular accuracy | ±0.6%* ±0.5 ±0.1M µ/mm (±0.6%* ±0.1 ±0.007F arc sec) |
| Resolution | 0.1 µm/m (0.01 arc sec) |
Where:
% = percentage of displayed value
M = measurement distance in metres
F = measurement distance in feet
* 0.2% accuracy available by special order
Linear and angular combination kit
This optics combination kit is a cost saving alternative for users who wish to perform both linear and angular measurements.
Each combination kit contains:
- 1 linear retroreflector and clamp screws
- 1 angular retroreflector
- 1 angular interferometer
- 3 alignment targets
| Part number | Description |
|---|---|
| A-8003-2774 | Linear and angular optics combination kit |
Straightness measurement optics kit: 0.1 - 4 m axis length
These optics allow the measurement of horizontal straightness error in linear axes up to 4 m in length to be made. They also enable axis parallelism to be measured.
Each short range straightness kit contains:
- 1 straightness interferometer
- 1 straightness reflector
| Part number | Description |
|---|---|
| A-8003-0443 | Straightness optics - short range |
Specification
| Axial range | 0.1 m - 4 m (4 in - 160 in) |
| Straightness measurement range | ±2.5 mm (±0.1 in) |
| Accuracy | ±0.5% ±0.5 ±0.15M2 µm (±0.5% ±20 ±0.5F2 µin) |
| Resolution | 0.01 µm (1 µin) |
Where:
% = percentage of displayed value
M = measuring distance in metres
F = measuring distance in feet
May require Universal (straightness) shutter or straightness accessory kit, depending upon application (see optics accessories section)
Straightness measurement optics kit: 1 - 30 m axis length
These optics can be used to measure the horizontal straightness error in linear axes from 1 m up to 30 m in length when using the XL-80 laser system. They also enable measurement for parallelism of axes.
Each long range straightness kit contains:
- 1 straightness interferometer
- 1 straightness retroreflector
- 2 alignment targets
| Part number | Description |
|---|---|
| A-8003-0444 | Straightness optics - long range |
Specification
| Axial range | 1 m - 30 m (40 in - 1200 in) |
| Straightness measurement range | ±2.5 mm (± 0.1 in) |
| Accuracy* | ±2.5% ±5 ±0.015M2 µm (±2.5% ±200 ±0.05F2 µin) |
| Resolution | 0.1 µm (10 µin) |
Where:
% = percentage of displayed value
M = measuring distance in metres
F = measuring distance in feet
* subject to environmental conditions
May require Universal (straightness) shutter or straightness accessory kit, depending upon application (see optics accessories section)
Squareness measurement optics
These optics 
determine the out-of-squareness of two nominally orthogonal axes, by comparing their straightness slope values which are referenced via the optical square.
Note:
A straightness measurement optics kit and straightness accessory kit are also required to perform squareness measurements.
Each squareness measurement optics kit contains:
- 1 optical square and clamp screws
- 1 bracket (for adjustable turning mirror)
| Part number | Description |
|---|---|
| A-8003-0665 | Squareness measurement optics |
Specification
| Range | ±3/M mm/m (±2000/F arc sec) |
| Resolution | 0.01 µm/m (0.01 arc sec) |
Where:
M = measurement distance in metres
F = measurement distance in feet
Flatness measurement kit
The flatness mirrors not only rotate horizontally, but also tilt to allow horizontal and vertical adjustment of the laser beam.
Note:
Angular optics are also required to perform flatness measurements.
Each flatness measurement kit contains:
- 2 flatness mirrors
- 1 50 mm flatness base
- 1 100 mm flatness base
- 1 150 mm flatness base
| Part number | Description |
|---|---|
| A-8003-0442 | Flatness measurement kit |
Specification
| Axial range | 0 m - 15 m |
| Flatness measurement range | ±1.5 mm (±0.06 in) |
| Accuracy | ±0.6%* ±0.02M2 µm (±0.6%* ±0.08F2 µin) |
| Resolution | 0.01 µm (1 µin) |
Where:
% = percentage of calculated flatness
M = length of diagonal in metres
F = length of diagonal in feet
英國雷尼紹新型XL-80激光干涉儀
英國雷尼紹新型XL-80激光干涉儀詳細介紹：
在超精密的測量和校準方面，激光干涉儀已經扮演多年極重要的角色。但是近年來隨著自動化運動系統性能大幅提高，面對半導體和傳統金屬加工業的需求，現有激光系統的性能已無法滿足一些客戶的要求。
Renishaw的新型XL-80激光干涉儀能夠滿足和超越實際工業規范水平，提供4m/s的測量速度和50kHz記錄速率。即使在的數據記錄速率下，系統準確性可達到±0.5ppm（線性模式）和1納米的分辨率，這些改進意味著工程師仍能使用可溯源性激光干涉的優勢，幫助解決現代化機器設計問題。
系統精度比原有的對應產品ML10激光系統有所提升，在整個日常溫度、氣壓和濕度不同工作環境下，均可達到±0.5ppm的精度。環境讀數使用XC-80智能傳感系統進行讀取，每7秒更新一次激光讀數補償值。還有一點很重要，與Renishaw的ML10系統一樣，所有測量值均采用穩定的氦氖激光源的波長為基準，保證能夠溯源至國際的長度標準。
此新系統可以與現有的ML10系統光學鏡組兼容，使目前數千ML10用戶能夠升級到新系統，并同時保留其在光學鏡組、程序和人員培訓上的原有投資。
我們還提供已更新的Renishaw軟件版本（LaserXL?及QuickViewXL?），能夠以用戶熟悉的、易于使用的格式提供數據。LaserXL?能夠執行循序漸進式的測量，以方便對大多數機床按標準進行檢驗，QuickViewXL?軟件能夠在屏幕上實時地顯示激光讀數。
您只要看一眼Renishaw的新型XL-80激光裝置和XC-80補償器，就會注意到它們比原有的ML10和EC10小了許多。現在，二者總重僅3公斤多一點（包括連接電纜、電源和傳感器），比原來減輕了70%。當然，隨著激光頭和補償器尺寸減小，其他系統組件，例如三腳架和云臺也相應地減小以便相配，因此整個系統（除了三腳架）的裝運箱減小了許多。現在，最小的“腳輪箱”只有原來箱子的一半大一點點，卻可以攜帶整個線性和角度測量系統，并有放置RenishawQC10球桿儀組件的位置。這個高度便攜的“檢查和修正”系統總重不到15公斤，同類產品無以匹敵。
為了與系統的其他組件的便攜性相匹配，我們設計了新型三腳架和裝運箱，僅重6.2公斤。
激光頭和云臺體積很小，能夠方便地固定在標準磁性座上，可以在不方便使用三腳架固定的應用條件下使用。XL-80激光測量系統的光束高度和光學鏡組尺寸與ML10系統一樣，因此也可以直接放在花崗巖工作臺（不使用三腳架云臺）上，進行坐標測量機的校準。
Renishaw已將激光的預熱時間縮短至大約僅6分鐘。預熱速度較同類系統快，因此用戶等待時間減少了，用于測量工作的幾率增加了，這對于機器校準服務商和那些需要在一個地點執行多項測量的用戶而言非常重要。
現在，信號增益的開啟和關閉是一項標準功能，使其具有80米線性測量距離的能力。若短距離應用時，則可以提高信號強度。激光信號通過USB連線直接輸出到電腦上（無需單獨的接口），輔助功能端口可提供模擬信號及工廠按需設定的數字信號輸出。
XL-80激光頭的配置集原ML10G/Q/X多種任選功能于一體，功能更完善。
XL-80系統具有長達3年標準的全面保修，并可以以優惠的價格選購延長保修時間為5年。對于使用ML10的老用戶和使用其他廠商制造的同類系統的新客戶，我們均提供一些特別優惠政策。
