Verifire™ XL 激光干涉儀是一個獨立的工作站，設計用于直徑達12英寸（300毫米）的大型平面的簡單可靠計量。示例包括前表面反射器，窗口和半導體晶片或晶片卡盤。
這種集成的系統易于使用，具有重型傾斜/傾斜平臺，可提供可重復的零件放置，無需定制夾具。
Verifire™ XL 激光干涉儀外形緊湊，內置隔振，需要最小的生產空間。
振動穩健
Verifire XL系統包括ZYGO的QPSI™采集技術，可在存在振動的情況下進行可靠的高精度測量。QPSI可實現真正的軸上表面形狀測量，而不會降低典型的生產振動。
準確的計量
Verifire XL系統中的高性能變速箱平面設計用于對重力下垂的最小靈敏度，并包括一個全區域校準文件，以實現系統精度。
Mx™軟件
ZYGO專有的Mx™測量和分析軟件提供廣泛的操作功能和數據可視化工具，可在易于使用的界面中實現的測量功能。
MX軟件現在包括SmartAveraging®技術，可幫助獲得在最短的時間量測量，以及內置的SPC提供了強大的能力進行生產的情況。
主要特點：
•12“（300mm）光圈
•緊湊的占地面積，獨立系統
•易于零件裝載和對齊
•簡單的設置和簡化的操作
•內置預對準傳輸平面
•集成的隔振和QPSI™技術，可在生產環境中進行可靠的測量
Large-Aperture Downward-Looking Interferometer Workstation
The Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.
This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation, requires minimal production floor space.
Vibration Robust
The Verifire XL system includes ZYGO's patented QPSI™ acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from typical production vibrations.
Accurate Metrology
The high-performance transmission flat in the Verifire XL system is designed for minimal sensitivity to gravitational sag, and includes a full-area calibration file to enable optimum system accuracy.
Mx™ Software
ZYGO's proprietary Mx™ measurement and analysis software offers a wide range of operational features and data visualization tools for unmatched measurement capability in an easy-to-use interface. Mx software now includes SmartAveraging®technology that helps to obtain the best possible measurement in the shortest amount of time, and the built-in SPC provides powerful capability for production situations.
