5853E: Analog Thermal Mass Flow Controller, 100 - 1,000 slpm, Elastomer Seals
The Brooks Model 5853E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 100 - 1,000 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
流量范圍：100slpm-1000slpm 精度：1% FS 壓力：100bar 1500psig 溫度：65℃ 150F 信號：0-5V
